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  #2  
10th May 2018, 04:37 PM
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Re: IIT Hyderabad Mems

Hii sir, I Wants to get the Information About the MEMS & Micro/Nano Systems Laboratory of the IIT Hyderabad ?
  #3  
10th May 2018, 04:38 PM
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Join Date: Aug 2012
Re: IIT Hyderabad Mems

The integration of electronic and mechanical components on the same silicon chip gave birth to a new technology, appropriately named microelectromechanical systems (MEMS) or microsystem technology (MST). MEMS has found applications in wide ranging areas such as chemical sensors, biosensors, aerospace, RF circuits, consumer electronics, etc.

Research Areas

MEMS/Microelectronics technology
Silicon Micromachining
Anodic Oxidation
IR Detector
MEMS-based Bio/Chemical Sensors
Inertial sensors
Thin films for MEMS

Faculty :

Prof Kazuo Sato, Aichi Institute of Technology, Japan
Prof Xing Yan, Southeast University, Nanjing, China
Dr. M.A Gosalvez, University of the Basque Country, Spain
Dr. M.Shikida, Nagoya University Japan
Dr. Hirotaka Hida, Kobe University, Japan

Facility
Ellipsometry
Wafer Dicing Saw
Confocal Microscope
RF & DC Magnetron Sputtering
Spin Coater
Mask Aligner
Optical & Stereo Microscopes
UV Exposure Setup

Contact Details :


Dr. Prem (O) Phone No :+91-40-2301-6035
Mr. Ashok (M) Mobile No :+91-73821-86822


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