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  #1  
1st May 2015, 09:25 AM
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Mems IITM

Can you tell me about the researches made by Microelectronics and MEMS laboratory in the Department of Electrical Engineering, IIT or Indian Institutes of Technology Madras? Also tell me about the courses offered by Department of Electrical Engineering, IIT or Indian Institutes of Technology Madras?
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  #2  
26th April 2018, 10:09 PM
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Re: Mems IITM

Can you tell me about the Research Focus Areas for Microelectronics and MEMS Lab of IITM (Indian Institute of Technology Madras)?
  #3  
26th April 2018, 10:10 PM
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Re: Mems IITM

Microelectronics and MEMS Lab of IITM (Indian Institute of Technology Madras) is well-equipped for semiconductor device and MEMS fabrication, characterization, modelling and simulation.

Research and Development: Focus Areas

High Speed Electronic and Optoelectronic Devices
GaN, GaAs & InP based BJTs, MOSFETs, HEMTs, LEDs & Photodetectors
Silicon Photonics: New Devices for Sensor & Communication Systems

Micro Electro Mechanical Systems (MEMS) & Bio-sensors
Optical MEMS (Variable Optical Attenuators, Micromirrors)
Sensors (Pressure Sensors and Accelerometers)
Actuators (Micropumps and microvalves)
Extraction of parameters (Youngs modulus, residual stress, stiction force)
BioMEMS (Triglyceride and urea sensors)
RF MEMS (RF switches and resonators)
Microfluidics (Conventional and Digital)

Modelling of Semiconductor Devices
Power and high frequency Semiconductor devices (AlGaN/GaN HEMTs with field plates, Super junction devices, Power MOSFETs, Spreading resistance modelling)
3-Dimensional modelling for small geometry devices (SOI MOSFETs, FinFETs)
Quantum mechanical modelling self-consistent solution of Poisson and Schrodinger equations (Resonant Tunnelling Diodes, Short Channel MOSFETs)
Modelling of Heterostructure devices (HEMTs, Si/SiGe MOSFETs)
Compact Modelling (SiGe/SiGe:C HBTs, LD-MOSFETs, CNFETs)

Other Research
Polycrystalline, porous and amorphous silicon (Carrier transport in polycrystalline and amorphous silicon thin films, Passivation techniques, Thin film transistors, Sensors)
Silicon On Insulator (SOI) MOSFETs and ICs (Technology development, New device concepts)
Ultra-thin gate dielectrics for MOSFETs (High-k gate dielectrics, Ultra-thin (<2 nm) SiO2 growth and characterization)


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