IAS Expert VPD

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Fully Automated Vapor Phase Decomposition (VPD) Device "Expert"

Expert TM is Designed for the Integration with Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Base on the Experience of Ultra trace Metal Analysis by ICP-MS.


Analysis of metallic impurities in Si wafer is one of important items in semiconductor manufacturing.

The concentration of metallic impurities to be controlled has been lower and lower as the integration has been higher.


Total Reflection X-Ray fluorescence has been used in a production line (FAB) because of its non-destructive technique.

Expert Specifications

EXP-Auto – Basic System
Main frame material Steel frame with anti-corrosion coating
Panel Transparent PVC windows, steel panels with anti-corrosion coating, PVC doors
Alarm tower 4 colors (Red, Yellow, Green, Blue)
Emergency switch 3 EMOs on the three different sides of the Expert
Teflon media ULPA filter ULPA filter with Class 1 environment, adjustable air flow

Expert TM was developed for Integration with ICP-MS and has the following features:


Integration with OHT and ICP-MS for fully automated operation
HF vapor generation
Bulk etching and depth profile measurement
Dual scan nozzle
Scan mode
Drying module
Multi-recipe
Load port
Safety certificate

Expert™ -
Fully Automated Vapor Phase Decomposition (VPD) Tool